I have no idea what happen but after upgrade to 2021.3.15 i got this error:
ArgumentOutOfRangeException: Specified argument was out of the range of valid values.
Parameter name: subshaderIndex
UnityEngine.Shader.FindSubshaderTagValue (System.Int32 subshaderIndex, UnityEngine.Rendering.ShaderTagId tagName) (at /Users/bokken/build/output/unity/unity/Runtime/Export/Shaders/Shader.bindings.cs:98)