My script is: System.Diagnostics.Process.Start("osk.exe");
but it gives my an error: Could not start On-Screen Keyboard.
I found out that described error happens if you’re trying to run osk.exe from 32 bit application on 64 bit operating system.
You get the error, because Unity is 32 bit. Building your Unity application as x86 and running it will result in the same error. If, on the other hand, you build it as x86_64, then on-screen keyboard should work as expected.
Please find more details in this thread. You will find a workaround there.